Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2007-05-08
2007-05-08
Kosowski, Alexander (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C702S045000, C073S023200
Reexamination Certificate
active
10886836
ABSTRACT:
Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.
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Tariq Faisal
Tinsley Kenneth E.
Celerity, Inc.
Kosowski Alexander
Lowrie, Lando & Anastasi, LLP.
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