Surface treatment system and method

Details Surface treatment system and method Surface treatment system and method

2007-02-13

2007-02-13

Chen, Bret (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

C427S569000, C118S719000, C118S7230ER, C118S7230AN

Reexamination Certificate

active

10496219

ABSTRACT:
A surface treatment system in which gas for a deposition reaction is injected into a deposition chamber and power is applied to form a deposition reaction to form a deposition layer at a surface of an object or surface treatment, wherein the deposition chamber has a plurality of deposition spaces disposed in parallel and a convey unit for conveying one or more objects of surface treatment to each deposition space or discharging the objects of surface treatment from each deposition space after a deposition reaction.

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