Substrate heating apparatus and manufacturing method for the...

Details Substrate heating apparatus and manufacturing method for the... Substrate heating apparatus and manufacturing method for the...

2007-07-24

2007-07-24

Paik, Sang Y. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S725000

Reexamination Certificate

active

11149080

ABSTRACT:
A substrate heating apparatus includes a ceramic base having a concave heating surface on which a substrate is placed, and a resistance heating element buried in the ceramic base. The central part of the concave heating surface defines the lowest point of the heating surface and the peripheral part of the concave heating surface defines the highest point of the heating surface.

REFERENCES:
patent: 6423949 (2002-07-01), Chen et al.
patent: 6730175 (2004-05-01), Yudovsky et al.
patent: 2002/0162630 (2002-11-01), Satoh et al.
patent: 2004/0011780 (2004-01-01), Sun et al.
patent: 2003-133195 (2003-05-01), None

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