Real-time component monitoring and replenishment system for...

Details Real-time component monitoring and replenishment system for... Real-time component monitoring and replenishment system for...

2007-05-08

2007-05-08

Gakh, Yelena G. (Department: 1743)

Chemistry: analytical and immunological testing

Determination of water

By use of a karl fischer reagent

C436S051000, C436S052000, C422S062000, C422S075000

Reexamination Certificate

active

10264408

ABSTRACT:
A multicomponent fluid composition monitoring and compositional control system, in which a component analysis is effected by titration or other analytical procedure, for one or more components of interest, and a computational means then is employed to determine and responsively adjust the relative amount or proportion of the one or more components in the multicomponent fluid composition, to maintain a predetermined compositional character of the multicomponent fluid composition. The system is usefully employed in semiconductor manufacturing photoresist and post-etch residue removal, in which the cleaning medium is a semi-aqueous solvent composition, and water is the monitored and responsively adjusted component.

REFERENCES:
patent: 4190481 (1980-02-01), Goffredo
patent: 4664756 (1987-05-01), Shimizu et al.
patent: 5722441 (1998-03-01), Teramoto
patent: 5746233 (1998-05-01), Kuroda et al.
patent: 5896874 (1999-04-01), Nakagawa et al.
patent: 5910269 (1999-06-01), Ono et al.
patent: 6146008 (2000-11-01), Laederich et al.
patent: 6284197 (2001-09-01), Abbott et al.
patent: 6355407 (2002-03-01), Takamuki et al.
patent: 61281532 (1986-12-01), None
patent: 4278529 (1992-10-01), None
patent: 5074755 (1993-03-01), None
patent: 07037851 (1995-02-01), None
Kohl Photoelectrochemical etching of semiconductors, IBM J. Res. Develop., 1998, v. 42, No. 5, pp. 629-637.
J. Electrochem Soc. 142 (1995) 1733.
Steigerwald, et al., J. ElectroChem Soc. 141, 2842 (1994).
Brusic, et al., J. Electrochem, Soc. 138, 2253, (1991).
Steigerwald, et al. “Chemical Mechanical Planarization of Microelectronic Materials”, Wiley, 1997.

Affiliated with

Also associated with

Rating

Real-time component monitoring and replenishment system for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Real-time component monitoring and replenishment system for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Real-time component monitoring and replenishment system for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3807867