Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1991-11-15
1992-08-25
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356352, 372 43, G01D 902
Patent
active
051413191
ABSTRACT:
A displacement detection device has a laser unit. The laser unit has two semiconductor lasers formed on a single substrate through a single process. One of the lasers has an end coated with a reflection preventing film and facing a mirror provided at the end of a cantilever. The other end of the laser is coated with a film having a high reflectance film such that a light resonator is formed together with the mirror and the high reflectance film. The other laser has both opposite ends coated with films of a high reflectance, and a light resonator is formed between the opposite ends. Two laser beams emitted from the two semiconductor lasers interfere with each other, and the resultant interference light enters the light detector. The detector detects a variation in the interference light caused by displacement of the mirror, and outputs a signal indicative of a displacement in the cantilever.
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J. Appl. Phys. 61 (10), May 15, 1987 "Atomic Force Microscopeforce Mapping & Profiling on a Sub 100-A Scale"; Y. Martin et al.
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Kajimura Hiroshi
Kato Masahiko
Kurtz, II Richard E.
Olympus Optical Co,. Ltd.
Turner Samuel A.
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