Load-lock chamber

Details Load-lock chamber Load-lock chamber

2007-11-27

2007-11-27

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

29217730

CLAIM:
The ornamental design for a load-lock chamber, as shown and described.

REFERENCES:
patent: 6045620 (2000-04-01), Tepman et al.
patent: 6270582 (2001-08-01), Rivkin et al.
patent: 6382902 (2002-05-01), Sugimura
patent: 2005/0005847 (2005-01-01), Hiroki
patent: 2005/0095088 (2005-05-01), Kurita et al.
patent: 2005/0193948 (2005-09-01), Oohirabaru et al.
patent: 2005/0205012 (2005-09-01), Jang
patent: 2005/0247265 (2005-11-01), Devine et al.
patent: 2006/0021575 (2006-02-01), Ishizawa et al.

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