Metal treatment – Compositions – Heat treating
Patent
1984-05-15
1985-07-02
Hearn, Brian E.
Metal treatment
Compositions
Heat treating
29571, 29590, 357 5, 427331, 4274193, 148DIG16, 148DIG89, 148DIG117, 148DIG118, H01L 21363
Patent
active
045266298
ABSTRACT:
One or more monolayers of cerium arrayed on the surface of a niobium metal acts as a catalyst to oxidation of the niobium at ambient temperature and results in a very thin, very high quality insulating layer which may be configured by patterning of the catalyst. Significant amounts of Nb.sub.2 O.sub.5 are formed at pressures as low as 6.6.times.10.sup.-6 Pa, promoted by the presence of the cerium. This catalytic activity is related to the trivalent to tetravalent valence change of the cerium during oxidation. The kinetics of Nb.sub.2 O.sub.5 formation beneath the oxidized cerium shows two stages:
REFERENCES:
patent: 4001317 (1977-01-01), Grasselli et al.
patent: 4274981 (1981-06-01), Suzuki et al.
patent: 4341662 (1982-07-01), Pfefferle
Sanz L. Hofmann; J. of Less-Common Metals; vol. 92, p. 317 (1983).
Forster et al.; Planar Area Definition Using Two-Level Self-Aligned Insulation Scheme, IBM Tech. Disc Bull.; vol. 26, No. 8, pp. 4254-4255, Jan. 1984.
Matsuda et al.; Study of Nb-Based Josephson Tunnel Junctions, J. Appl. Phys., vol. 51, No. 8, pp. 4310-4316, Aug. 1980.
Broom et al.; Niobium Oxide-Barrier Tunnel Junction, IEEE Trans. Elec. Dev., vol. ED-27, No. 10, pp. 1998-2008, Oct. 1980.
Latta Ernst-Eberhard
Ronay Maria
Hearn Brian E.
Hey David A.
International Business Machines - Corporation
Kling Carl C.
LandOfFree
Catalytic oxidation of solid materials does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Catalytic oxidation of solid materials, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Catalytic oxidation of solid materials will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-379685