Polishing cloth for chemical mechanical polishing, and...

Details Polishing cloth for chemical mechanical polishing, and... Polishing cloth for chemical mechanical polishing, and...

2007-07-03

2007-07-03

Eley, Timothy V. (Department: 3723)

Abrading

Machine

Rotary tool

C451S527000

Reexamination Certificate

active

09449907

ABSTRACT:
A chemical mechanical polishing cloth for chemically mechanically polishing a workpiece. This chemical mechanical polishing cloth includes, on the opposite-to-workpiece face thereof: polishing projections having polishing faces arranged to come in contact with a workpiece for polishing the same; polishing agent passages for introducing a polishing agent; and at least one-stage step portions formed between the polishing faces of the polishing projections and the bottoms of the polishing agent passages.

REFERENCES:
patent: 5632790 (1997-05-01), Wiand
patent: 5778481 (1998-07-01), Amsden et al.
patent: 5816900 (1998-10-01), Nagahara et al.

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