Method of correcting chromatic aberrations in...

Details Method of correcting chromatic aberrations in... Method of correcting chromatic aberrations in...

2007-04-17

2007-04-17

Gagliardi, Albert (Department: 2884)

Radiant energy

With charged particle beam deflection or focussing

With detector

Reexamination Certificate

active

11226907

ABSTRACT:
Method and system for correcting chromatic aberrations in a charged-particle beam for automated correction of chromatic aberrations. The system directs a part of the charged-particle beam as a probe at a specimen. The system includes an extraction unit for extracting probe profiles from scanned images created by the beam, a chromatic aberration calculator for calculating chromatic aberrations in the system from the extracted probe profiles, and a correction unit for operating a chromatic aberration corrector based on the calculated chromatic aberrations.

REFERENCES:
patent: 7095031 (2006-08-01), Uno
patent: 2005/0156117 (2005-07-01), Uno
patent: WO 01/56057 (2001-08-01), None
Von H. Rose, “Abbildungseigenschaften sphärisch korrigierter elektronenoptischer Achromate”,Optik 33, Heft I(1971), pp. 1-24.
M. Haider, W. Bernhardt and H. Rose, “Design and Test of an Electric and Magnetic Dodecapole Lens”,Optik 63, No. 1 (1982), pp. 9-23.
J. Zach, “Design of a High-Resolution Low-Voltage Scanning Electron Microscope”,Optik 83, No. 1 (1989), pp. 30-40.
Joachim Zach and Maximilian Haider, “Aberration Correction in a Low Voltage SEM by a Multipole Corrector”,Nuclear Instruments and Methods in Physics Research A 363(1995), pp. 316-325.

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