Synthesis of photoresist polymers

Details Synthesis of photoresist polymers Synthesis of photoresist polymers

2007-07-31

2007-07-31

Harlan, Robert D. (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

C525S261000, C525S263000, C525S220000, C525S222000, C525S230000, C526S222000, C526S281000

Reexamination Certificate

active

10877110

ABSTRACT:
The present invention is directed to the preparation of photoresist polymers via living free radical polymerization techniques. Sterically bulky ester monomers are utilized as the polymerization components. Use of chain transfer agents is included in polymerization processing conditions. Cleavage of polymer terminal end groups that include a heteroatom are described.

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