Vibration type gyrosensor device

Details Vibration type gyrosensor device Vibration type gyrosensor device

2007-09-04

2007-09-04

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120, C310S329000

Reexamination Certificate

active

11088480

ABSTRACT:
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode6a, formed along the length of the oscillator11for applying the voltage for causing oscillations of the oscillator11, and first and second detection electrodes6b,6c, formed on both sides of the driving electrode6aparallel to the longitudinal direction of the oscillator, without contacting with the driving electrode6a. With a width W0of the driving electrode6a, a width W1of the first detection electrode6b, a width W2of the second detection electrode6cand with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.

REFERENCES:
patent: 4443729 (1984-04-01), Rider
patent: 5321685 (1994-06-01), Nose et al.
patent: 5794080 (1998-08-01), Watanabe et al.
patent: 5796000 (1998-08-01), Fujiu et al.

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