Radiant energy – Irradiation of objects or material
Reexamination Certificate
2007-05-01
2007-05-01
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492100
Reexamination Certificate
active
11024011
ABSTRACT:
A method for the protection of an optical element of a lithographic apparatus including the optical element and a source of radiation includes providing a material including one or more elements selected from B, C, Si, Ge and/or Sn, and arranging the material such that the source, in use, causes removal of at least part of the material, thereby providing depositable material, and such that at least part of the depositable material deposits on the optical element.
REFERENCES:
patent: 6359969 (2002-03-01), Shmaenok
patent: 6576912 (2003-06-01), Visser et al.
patent: 2006/0072084 (2006-04-01), Van Herpen et al.
Bakker Levinus Pieter
Schuurmans Frank Jeroen Pieter
ASML Netherlands B.V.
Leybourne James J.
Pillsbury Winthrop Shaw & Pittman LLP
Wells Nikita
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