Position measuring device

Details Position measuring device Position measuring device

2007-09-25

2007-09-25

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S499000, C250S23700G

Reexamination Certificate

active

10493153

ABSTRACT:
A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that measures an angle between the movable element and the base body. A light source that directs light along a beam path, a detector within the beam path and a grating within the beam path between the light source and the detector. For measuring the angle, the beam path extends between the movable element and the base body so that an intensity strip pattern is created by illuminating the grating by the light source, whose position relative to the detector is a measure of the angle.

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