Silsesquioxane compound mixture, method of making, resist...

Details Silsesquioxane compound mixture, method of making, resist... Silsesquioxane compound mixture, method of making, resist...

2007-09-04

2007-09-04

Page, Thurman K. (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

C430S270100

Reexamination Certificate

active

11393911

ABSTRACT:
A silsesquioxane compound mixture having a high proportion of silsesquioxane compounds bearing bulky substituent groups on side chain and having a degree of condensation of substantially 100% is prepared by a first stage wherein a silane feed comprising a trifunctional silane bearing a bulky substituent group on side chain represented by formula (1):wherein Y is an aliphatic or aromatic organic group optionally having a functional group, X1, X2and X3are H, halogen, alkoxy or aryloxy is hydrolyzed in the presence of an acid or base catalyst, and a second stage wherein dehydrating condensation is carried out in the presence of a strong base catalyst while removing the water resulting from condensation out of the reaction system.

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