Coating apparatus – Program – cyclic – or time control
Reexamination Certificate
2007-04-03
2007-04-03
Edwards, Laura (Department: 1734)
Coating apparatus
Program, cyclic, or time control
C118S300000, C118S315000, C347S001000, C347S017000
Reexamination Certificate
active
10359136
ABSTRACT:
The present invention provides a device manufacturing apparatus in which a device can be precisely manufactured by stably ejecting a predetermined amount of droplets when the device is manufactured using a droplet ejecting device. The apparatus can include a pressure generation chamber having a Helmholtz resonance frequency of a period TH. A driving signal includes a first signal element to cause the pressure generation chamber to expand, a second signal element to cause the expanded pressure generation chamber to contract, and a third signal element to cause the pressure generation chamber to expand to its original state, which is held before the first signal element is output, after ejection of a droplet. The time which elapses between the beginning of output of the first signal element and the beginning of output of the second signal element, and the time which elapses between the beginning of output of the second signal element and the beginning of output of the third signal element are set to be substantially equivalent to the period TH. The sum of the amplitude of the first signal element and that of the third signal element is set to be substantially equivalent to the amplitude of the second signal element. Accordingly, it is possible to effectively suppress the vibration of a meniscus in the nozzle opening corresponding to the pressure generation chamber.
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Edwards Laura
Oliff & Berridg,e PLC
Seiko Epson Corporation
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