Composition and method for temporarily fixing solid

Details Composition and method for temporarily fixing solid Composition and method for temporarily fixing solid

2007-03-06

2007-03-06

Wu, Shean C (Department: 1756)

Stock material or miscellaneous articles

Liquid crystal optical display having layer of specified...

With bonding or intermediate layer of specified composition

C252S299010

Reexamination Certificate

active

10483178

ABSTRACT:
The present invention relates to a method of temporarily and firmly fixing two solids to each other and to a composition used in the method, which is a method of temporarily fixing, comprising temporarily fixing the two solids to each other with a liquid crystal compound or a composition comprising the liquid crystal compound. This method is used for a method of temporarily fixing a pad for chemical mechanical polishing, for example, to polish a wafer for a semiconductor device fixed on a surface of a base plate, when one solid is a pad for chemical mechanical polishing of a wafer for a semiconductor device and the other is a base plate to fix the pad.

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English abstract for JP 02-202981, 1990.

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