Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate
2007-03-13
2007-03-13
Lee, Kyung S. (Department: 2832)
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Polarity-responsive
C200S181000
Reexamination Certificate
active
10425861
ABSTRACT:
A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.
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Wang, Y. et al., “A Micromachined RF Microrelay with Electrothermal Actuation,”Sensors and Actuators A, vol. 103, p. 231-236 (2003).
Danzl Ralph B.
Habets Philippe
Houben Richard P. M.
Mattes Michael F.
Receveur Rogier
Lee Kyung S.
Medtronic Inc.
Rojas Bernard
Soldner Michael C.
Wolde-Michael Girma
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