Metal working – Piezoelectric device making
Reexamination Certificate
2007-07-10
2007-07-10
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S890100, C427S100000, C427S226000, C427S419800
Reexamination Certificate
active
10815757
ABSTRACT:
A method for manufacturing a piezoelectric thin film component wherein a thin titanium film is deposited on a bottom metal layer such that parts of the thin titanium film remain on crystal grain boundaries of the bottom metal layer and form seed crystals. A polycrystalline piezoelectric thin film is formed on the bottom metal layer so that a pervoskite crystalline lattice is grown from the seed crystals.
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European Search Report Oct. 14, 2004.
Hong Qiu
Sumi Kouji
Seiko Epson Corporation
Tugbang A. Dexter
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