Illumination optical apparatus and scanning exposure apparatus

Details Illumination optical apparatus and scanning exposure apparatus Illumination optical apparatus and scanning exposure apparatus

2007-09-18

2007-09-18

Matthews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S618000

Reissue Patent

active

09326214

ABSTRACT:
An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.

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