Tunable optical device

Details Tunable optical device Tunable optical device

2007-09-11

2007-09-11

Font, Frank G. (Department: 2883)

Optical waveguides

Having particular optical characteristic modifying chemical...

C385S140000, C372S050121

Reexamination Certificate

active

10976812

ABSTRACT:
The present innovation discloses the design, configuration and process of a kind of MEMS-based tunable optical devices. The devices can be classed as dual-cavity of Fabry-Perot resonators, which consist of a first outer membrane, a middle membrane and a second outer membrane. And these membranes are separated by cavities. The membranes will deflect under electrostatic force and the thicknesses of cavities will change. The numbers of the layers of membranes should satisfy an equation. These devices can be adopted for optical switches, VOA or tunable filters.

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