Ion beam irradiation device

Details Ion beam irradiation device Ion beam irradiation device

2007-05-29

2007-05-29

Vanore, David (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C315S111810

Reexamination Certificate

active

10736677

ABSTRACT:
Disclosed is an ion beam irradiation device including a holder supporting a substrate; and an ion beam source that is a predetermined distance from the substrate and inclined to be substantially parallel with the substrate and that irradiates the substrate with an ion beam.

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patent: 6236163 (2001-05-01), Maishev et al.
patent: 6238582 (2001-05-01), Williams et al.

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