Method for automatic configuration of processing system

Details Method for automatic configuration of processing system Method for automatic configuration of processing system

2007-05-08

2007-05-08

Williams, Hezron (Department: 2856)

Measuring and testing

Testing of apparatus

C700S121000, C073S001010

Reexamination Certificate

active

10776452

ABSTRACT:
A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.

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