Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2007-09-25
2007-09-25
Vanore, David (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492230, C250S548000, C355S053000, C355S067000
Reexamination Certificate
active
11022923
ABSTRACT:
A projection system comprises an array of lenses MLA, each lens transmitting a unique part of a patterned beam. Measuring devices measure a distance between the array of lenses MLA and a substrate W. A controller controls an actuator to adjust a position (e.g., height and/or tilt) of the microlens array MLA.
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De Smit Joannes Theodoor
Lof Joeri
ASML Netherlands B.V.
Sterne Kessler Goldstein & Fox PLLC
Vanore David
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