Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-03-06
2007-03-06
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S112000, C414S217100, C438S014000
Reexamination Certificate
active
09932580
ABSTRACT:
This invention includes a method of integrating into a semiconductor specimen fabrication station a process diagnostic module that performs on the semiconductor specimen a processing operation that otherwise would not be performed by the processing components to thereby make the fabrication station more efficient and flexible to use. The process diagnostic module includes, for example, a specimen parameter measurement system or a specimen inspection system and is configured to mount on a front-opening interface mechanical standard (FIMS) load port and fits within the allowable spatial envelope. This invention further includes located external to the semiconductor specimen fabrication station a processor that receives and processes data acquired by the process diagnostic module during its operation.
REFERENCES:
patent: 5940175 (1999-08-01), Sun
patent: 6020957 (2000-02-01), Rosengaus et al.
patent: 6420864 (2002-07-01), Abraham et al.
patent: 6591162 (2003-07-01), Martin
patent: 6625497 (2003-09-01), Fairbairn et al.
patent: 6884639 (2005-04-01), Dougan et al.
patent: 2002/0118365 (2002-08-01), Kessel et al.
patent: WO 98/59229 (1998-12-01), None
patent: WO 01/73824 (2001-10-01), None
“I300I Guidelines on 300 mm Process Tool Mechanical Interfaces for Wafer Lot Delivery, Buffering, and Loading,” (Rev. D, Sep. 3, 1996), International 300 mm Initiative, Inc., 6 pgs.
SEMI E19-0697, “Standard Mechanical Interface (SMIF),” © SEMI 1991, 1997, pp. 1-5.
SEMI E19.1-0697, Port Standard for Mechanical Interface of Wafer Cassette Transfer, 100 mm (4 inch) Port, © SEMI 1991, 1997, pp. 1-2.
SEMI E19.5-0996, “Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF),” © SEMI 1978, 1996, pp. 1-4.
SEMI E21-94, “Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard,” © SEMI 1991, 1999, pp. 1-7.
SEMI E21.1-1296, “Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport Standard,” © SEMI 1992, 1996, pp. 1-5.
SEMI E22-0697, “Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard,” © SEMI 1991, 1997, pp. 1-6.
SEMI E22.1-1296, “Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume Standard,” © SEMI 1992, 1996, pp. 1-3.
SEMI E1.9-0699, “Provisional Mechanical Specification for Cassettes used to Transport and Store 300 mm Wafers,” © SEMI 1994, 1999, pp. 1-21.
SEMI E15-0698, “Specification for Tool Load Port,” © SEMI 1990, 1998, pp. 1-8.
SEMI E15.1-0200A, “Provisional Specification for 300 mm Tool Load Port,” © SEMI 1996, 2000, pp. 1-11.
SEMI E15.1-0600, “Specification for 300 mm Tool Load Port,” © SEMI 1996, 2000, pp. 1-11.
SEMI E47-0301, Specification for 150 mm/200 mm Pod Handles, © SEMI 1995, 2001, pp. 1-4.
SEMI E47.1-0301, “Provisional Mechanical Specification for Boxes and Pods used to Transport and Store 300 mm Wafers,” © SEMI 1997, 2001, pp. 1-21.
SEMI E57-0600, “Mechanical Specification for Kinematic Couplings used to Align and Support 300 mm Wafer Carriers,” © SEMI 1996, 2000, pp. 1-7.
SEMI E62-0701, “Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS),” © SEMI 1997, 2001, pp. 1-9.
SEMI E63-0600A, “Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (Bolts-M) Interface,” © SEMI 1997, 2000, pp. 1-7.
SEMI E64-0600, “Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port,” © SEMI 1997, 2000, pp. 1-5.
Ashkenaz Scott
Larson C. Thomas
Baker & McKenzie LLP
Garland Steven R.
KLA-Tencor Technologies Corp.
Picard Leo
LandOfFree
Method of interfacing ancillary equipment to FIMS processing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of interfacing ancillary equipment to FIMS processing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of interfacing ancillary equipment to FIMS processing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3764491