Pressure sensor assembly

Details Pressure sensor assembly Pressure sensor assembly

2007-07-17

2007-07-17

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S753000

Reexamination Certificate

active

11124832

ABSTRACT:
A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.

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EP Search Report dated Aug. 18, 2006.

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