Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-04-10
2007-04-10
Epps, Georgia (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559330, C250S559360, C250S559460, C356S508000
Reexamination Certificate
active
11343476
ABSTRACT:
Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
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Garssen Adriaan
Groen Joost van
Maria de Ridder Christianus Gerardus
ASM International N.V.
Bui-Pho Pascal M.
Epps Georgia
Knobbe Martens Olson & Bear LLP
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