Prevention of robot damage via capacitive sensor assembly

Details Prevention of robot damage via capacitive sensor assembly Prevention of robot damage via capacitive sensor assembly

2007-03-06

2007-03-06

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S658000, C073S570000, C073S662000

Reexamination Certificate

active

11226722

ABSTRACT:
A capacitive sensor assembly for a robot to prevent damage to the robot when it moves in an undesired manner is disclosed. The robot may be used in conjunction with semiconductor fabrication applications. The capacitive sensor assembly can include a hit contact, one or more fixed contacts, one or more damping springs, and a capacitive sensor. The hit contact comes into contact with a barrier as a result of undesired movement by the robot. The damping springs are compressed against the fixed contacts when the hit contact comes into contact with the barrier. The capacitive sensor has a capacitance that changes as the hit contact comes into contact with the barrier. The capacitance of the capacitive sensor is used to detect the robot coming into contact with the barrier, so that damage to the robot can be prevented.

REFERENCES:
patent: 2005/0113964 (2005-05-01), van der Meulen
patent: 4321056 (1995-01-01), None

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