Capacitive sensor for dynamical quantity

Details Capacitive sensor for dynamical quantity Capacitive sensor for dynamical quantity

2007-05-15

2007-05-15

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C361S280000

Reexamination Certificate

active

11039500

ABSTRACT:
A capacitive sensor for measuring a dynamical quantity based on a change in capacitance has a semiconductor substrate having a weight supported by beams so as to undergo displacement according to the dynamical quantity. The semiconductor substrate is sandwiched between glass substrates on which fixed electrodes are disposed in a position facing the weight with minute gaps existing between the glass substrates and the weight. A substrate electrode is disposed on one of the glass substrates and contacts a part of the semiconductor substrate. A recess having a size equal to or larger than a contact area in which the semiconductor substrate contacts the substrate electrode is formed in the semiconductor substrate, and a contact electrode is disposed in the recess in contact with the substrate electrode.

REFERENCES:
patent: 5760290 (1998-06-01), Ueyanagi
patent: 5801313 (1998-09-01), Horibata et al.
patent: 6759591 (2004-07-01), Yoshida et al.
patent: 2005/0076719 (2005-04-01), Jakobsen et al.

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