Semiconductor device having thin film resistor protected...

Details Semiconductor device having thin film resistor protected... Semiconductor device having thin film resistor protected...

2007-04-10

2007-04-10

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S537000, C257S350000, C257S351000, C257S358000, C257S360000, C257S363000, C257S379000

Reexamination Certificate

active

10848384

ABSTRACT:
A semiconductor device, a method for manufacturing the semiconductor device, and an integrated circuit including the semiconductor device are disclosed. The semiconductor device includes a substrate section, a resistor formed on the substrate section, a metal pattern formed on the resistor, an oxide pattern formed on the metal pattern, and a protective film covering the resistor, the metal pattern and the oxide pattern. With this structure, the metal pattern sufficiently prevents formation of an oxide film on a surface of the resistor even when dry ashing or dry etching is performed in the manufacturing process.

REFERENCES:
patent: 5525834 (1996-06-01), Fischer et al.
patent: 5592006 (1997-01-01), Merrill
patent: 6532027 (2003-03-01), Ozaki et al.
patent: 6642585 (2003-11-01), Ohuchi et al.
patent: 6888232 (2005-05-01), Eldridge et al.
patent: 07-202124 (1995-08-01), None
patent: 11-044485 (1999-02-01), None
patent: 11-142527 (1999-05-01), None
patent: 2001-110895 (2001-04-01), None
patent: 2002-094075 (2002-03-01), None
patent: 1020010047930 (2002-02-01), None

Affiliated with

Also associated with

Rating

Semiconductor device having thin film resistor protected... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device having thin film resistor protected..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device having thin film resistor protected... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3759536