Single-mode vertical cavity surface emitting lasers and...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S046010, C372S096000

Reexamination Certificate

active

10694290

ABSTRACT:
In one aspect, a vertical cavity surface emitting laser (VCSEL) is operable to generate single-mode laser light at an operative wavelength. The VCSEL includes a light-emitting surface and a monolithic longitudinal stack structure. The longitudinal stack structure includes a first mirror, a second mirror, and a cavity region. The cavity region is disposed between the first mirror and the second mirror and includes an active light generation region and a cavity extension region. The longitudinal stack structure further includes an ion-implanted current confinement region. A VCSEL array incorporating the above described VCSEL and a method of making the above-described VCSEL also are described.

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