Vaporization source with baffle

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure

Reexamination Certificate

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Details

C392S389000

Reexamination Certificate

active

11032899

ABSTRACT:
A vapor deposition source for depositing organic material includes a boat having a cavity for holding organic material and an aperture plate, having a plurality of spaced apertures, for enclosing the boat. The vapor deposition source also includes a heating element provided in the cavity between the aperture plate and the organic material, and a baffle member in contact with the heating element and having at least three surfaces which absorb energy from the heating element, the first surface redirecting energy to the aperture plate and the second and third surfaces redirecting energy to the boat walls and the organic material.

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