Scatterometer and a method for inspecting a surface

Details Scatterometer and a method for inspecting a surface Scatterometer and a method for inspecting a surface

2007-07-24

2007-07-24

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

C356S600000

Reexamination Certificate

active

10546313

ABSTRACT:
A scatterometer comprising a source (2) for providing an incident radiation beam (1) to be directed to the surface of a sample (4), and means for directing said incident radiation beam (1) at different angles towards the surface of the sample (4). The scatterometer furthermore comprising a screen (6) for receiving the reflection (7) of the incident radiation beam (1), and a camera (9) for recording the scatter profile (7) as projected on said screen (6) by the reflected radiation beam (5). The scatterometer is provided with means (11,12,13,14,15) for moving the screen (6) and thereby keeping it in the reflected radiation beam (5), and with means for keeping the camera (9) directed to the moving screen (6).

REFERENCES:
patent: 5880843 (1999-03-01), Hermosillo-Valadez et al.
patent: 3731171 (1989-03-01), None
patent: 19954183 (2001-05-01), None
patent: 60228910 (1985-11-01), None

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