Wafer holding apparatus

Details Wafer holding apparatus Wafer holding apparatus

2007-03-06

2007-03-06

Kackar, Ram (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S668000

Reexamination Certificate

active

10450654

ABSTRACT:
The invention provides a wafer holding apparatus which enables ascertainment of gripping and presence/absence of a wafer through use of single detection means.The apparatus has drive means (2) having a pressing element (8) which advances or recedes in a longitudinal direction; and detection means (9) for detecting advancement/receding of the pressing element (8). When the detection means (9) has detected that the pressing element (8) has advanced to and come to a halt at a predetermined position, the wafer is determined to be properly held. When the detection means (9) has detected that the pressing element (8) has advanced in excess of the predetermined position, the wafer is determined not to be present on the wafer holding apparatus.

REFERENCES:
patent: 4676884 (1987-06-01), Dimock et al.
patent: 5133635 (1992-07-01), Malin et al.
patent: 5810935 (1998-09-01), Lee et al.
patent: 6167322 (2000-12-01), Holbrooks
patent: 6256555 (2001-07-01), Bacchi et al.
patent: 6614201 (2003-09-01), Saino et al.
patent: 6817640 (2004-11-01), Menon et al.
patent: 6909276 (2005-06-01), Hofer et al.
patent: 3-154794 (1991-07-01), None
patent: 7-37960 (1995-02-01), None
patent: 7-193114 (1995-07-01), None
patent: 11-220002 (1999-08-01), None
patent: 2000-68352 (2000-03-01), None
patent: 2000-77497 (2000-03-01), None
patent: 2000-306982 (2000-11-01), None

Affiliated with

Also associated with

Rating

Wafer holding apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer holding apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer holding apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3742632