Piezoelectric thin-film resonator and filter using the same

Details Piezoelectric thin-film resonator and filter using the same Piezoelectric thin-film resonator and filter using the same

2007-05-01

2007-05-01

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S366000

Reexamination Certificate

active

10966035

ABSTRACT:
A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1<a/b<1.9 is satisfied where a is a main axis of the elliptical shape, and b is a sub axis thereof.

REFERENCES:
patent: 4642508 (1987-02-01), Suzuki et al.
patent: 5281935 (1994-01-01), Knecht et al.
patent: 6147438 (2000-11-01), Nishiwaki et al.
patent: 6150703 (2000-11-01), Cushman et al.
patent: 6215375 (2001-04-01), Larson et al.
patent: 2003-133892 (2003-05-01), None
patent: 2003133892 (2003-05-01), None
patent: 2003-204239 (2003-07-01), None

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