Projection exposure mask, projection exposure apparatus, and...

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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C355S077000, C430S005000

Reexamination Certificate

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11331193

ABSTRACT:
A projection exposure mask including a first mask pattern for exposing a member to form a continuous pattern thereon, and a second mask pattern for exposing the member to form a discontinuous pattern thereon. One of the first and second mask patterns is a reflecting type mask pattern and the other mask pattern is a transmitting type mask pattern.

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patent: 0 986 094 (2000-03-01), None
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patent: 2000-91221 (2000-03-01), None
European Search Report dated Sep. 22, 2005, issued in corresponding European patent application No. EP 04 00 1974, forwarded in a Communication dated Sep. 29, 2005.

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