Interferometric measuring device

Details Interferometric measuring device Interferometric measuring device

2007-03-06

2007-03-06

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S479000

Reexamination Certificate

active

10432123

ABSTRACT:
An interferometric measuring device for measuring surface characteristics, shapes, distances, and changes in distance, for example vibrations, of measurement objects includes a probe section. A configuration with respect to ease of use and error-free scanning may be provided by the fact that the probe section is subdivided into a fixed probe section and a rotatable probe section mechanically and optically coupled thereto, and that a beam splitter is arranged in the rotatable probe section for creating a reference beam and a measuring beam for the interferometric measurement.

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