Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2007-07-17
2007-07-17
Nguyen, Tu T. (Department: 2886)
Optics: measuring and testing
By polarized light examination
Reexamination Certificate
active
11141199
ABSTRACT:
A system and method are presented for measurement on an article. The system comprises an illuminator for producing light of at least one predetermined wavelength range; an optical system; a displacement arrangement; and a control system. The optical system is configured to define at least a measurement channel, and comprises a light directing assembly for directing an input light beam, propagating along an input light path from the illuminator, onto the article and directing a light beam returned from the illuminated region of the article to at least one light detector. The displacement arrangement is associated with at least the light directing assembly of the optical system, and is configured and operable by the control system to rotate said at least light directing assembly of the optical system with respect to a stage supporting the article about a rotational axis substantially normal to the stage.
REFERENCES:
patent: 5604344 (1997-02-01), Finarov
patent: 5682242 (1997-10-01), Eylon
patent: 5887590 (1999-03-01), Price
patent: 6122051 (2000-09-01), Ansley et al.
patent: 6734967 (2004-05-01), Piwonka-Corle et al.
patent: 6859278 (2005-02-01), Johs et al.
patent: 6859279 (2005-02-01), Tabet
patent: 6867862 (2005-03-01), Nikoonahad
patent: 58039932 (1983-03-01), None
patent: 02079760 (2002-10-01), None
U.S. Appl. No. 11/003,012.
R. M. Azzam et al “Ellipsometry and Polarized Light” (1986) pp. 364-411.
Masaki Yamamoto, “A New Type of Precision Ellipsometer without Employing a Compensator” Optics Communications, vol. 10, No. 2, (Feb. 1974) pp. 200-202.
Browdy and Neimark PLLC
Nguyen Tu T.
Nova Measuring Instruments Ltd.
LandOfFree
Optical measurement device and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical measurement device and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical measurement device and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3734581