Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate
2007-07-03
2007-07-03
Ip, Paul (Department: 2837)
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
C318S640000, C318S569000, C318S575000, C355S072000, C355S053000, C074S721000, C074S521000
Reexamination Certificate
active
11362605
ABSTRACT:
In one embodiment, a flexure stage comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other. The positioning mechanism is coupled between the base and the stage. The positioning mechanism includes an actuator and a flexure structure engaged by the actuator. The flexure structure includes base links coupled to the first base portion, stage links coupled to the first stage portion, and an intermediate link coupled to both the base and stage links. All structures are coupled by flexure hinge connections. The control device generates a control signal to change position of the stage by sending a control signal to the actuator which provides a force to elastically deform the flexure structure and correspondingly move the stage.
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Ferreira Placid M.
Yao Qing
Ip Paul
Krieg DeVault LLP
Paynter, Esq. L. Scott
The Board of Trustees of the University of Illinois
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