Apparatus for generating planar plasma using concentric...

Details Apparatus for generating planar plasma using concentric... Apparatus for generating planar plasma using concentric...

2007-01-16

2007-01-16

Alejandro-Mulero, Luz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With radio frequency antenna or inductive coil gas...

C118S7230IR

Reexamination Certificate

active

10383427

ABSTRACT:
A plasma source using a combination of concentric coils and ferromagnetic cores drives a radio frequency magnetic flux with controlled radial magnitude variation through a window into a reduced pressure process chamber, to provide improved plasma generation efficiency and ease of process uniformity adjustment.

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patent: 6462483 (2002-10-01), Jeng et al.
patent: 2004/0060517 (2004-04-01), Vukovic et al.

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