Photodiode array with a plurality of depressions

Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit

Reexamination Certificate

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C257S447000, C250S370110

Reexamination Certificate

active

07148464

ABSTRACT:
In a photodiode array1,incident-side depressions7formed by thinning from the incident surface side of light to be detected are arranged in an array, whereas opposite-side depressions11formed by thinning regions corresponding to regions formed with the incident-side depressions7from the side opposite from the incident surface are arranged in an array. The bottom of the opposite-side depressions11is formed with a pn junction3,whereby photodiodes of pn junction type are arranged in an array.

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