Measuring and testing – With fluid pressure – Dimension – shape – or size
Reexamination Certificate
2006-10-24
2006-10-24
Larkin, Daniel S. (Department: 2856)
Measuring and testing
With fluid pressure
Dimension, shape, or size
C073S105000
Reexamination Certificate
active
07124624
ABSTRACT:
An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
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Bogursky Kenneth M.
Gajdeczko Boguslaw F.
Galburt Daniel N.
Sander Willy M.
Violette Kevin J.
ASML Holding N.V.
Larkin Daniel S.
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