Tray for substrate

Details Tray for substrate Tray for substrate

2006-12-26

2006-12-26

Lamb, Brenda A. (Department: 1734)

Coating apparatus

Work holders, or handling devices

C118S501000

Reexamination Certificate

active

07153365

ABSTRACT:
A tray, used for transferring a substrate and conducting a coating process, includes a recessed portion to accommodate a substrate, the depth of the recessed portion being substantially the same as the thickness of the substrate, and a one-step-lower gutter which is provided on an outer periphery of said recessed portion or inside the outer periphery of said recessed portion. The tray may further comprise a plurality of attracting grooves which are provided concentrically in a surface of said recessed portion; attracting holes which are provided in each attracting groove, respective attracting passages by which said attracting holes are connected to a vacuum source, and a pre-dispensing area which is formed on the same surface as the recessed portion to receive a coating liquid from a nozzle

REFERENCES:
patent: 4024835 (1977-05-01), Scheu et al.
patent: 4418639 (1983-12-01), Wills et al.
patent: 5171398 (1992-12-01), Miyamoto
patent: 5454871 (1995-10-01), Liaw et al.
patent: 5707051 (1998-01-01), Tsuji
patent: 6495205 (2002-12-01), Gibson et al.
patent: 6844921 (2005-01-01), Komatsu
patent: 2003/0118724 (2003-06-01), Kim
patent: 3336897 (2002-08-01), None
patent: 2002-289675 (2002-10-01), None
patent: 2002-313888 (2002-10-01), None
patent: 2002-313891 (2002-10-01), None

Affiliated with

Also associated with

Rating

Tray for substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Tray for substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tray for substrate will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3713005