Process for calibrating the temperature control unit of an...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Havin growth from molten state

Reexamination Certificate

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C117S082000, C117S083000, C117S200000, C117S201000, C117S202000

Reexamination Certificate

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07125452

ABSTRACT:
A process for calibrating the temperature control unit of a vertical gradient freeze crystal growth oven, instead of the fused material a test body (3) is used in the oven (1) that does not melt at the oven temperature, that has a heat conductivity comparable to the fused material and a central bore (4). After turning on the resistance heaters (8, 9, 10) of the oven (1) the temperature at the level of the individual control temperature indicators (11, 12, 13) of the oven (1) is measured via a reference temperature indicator (5) that can be fully inserted into the bore (4) and subsequently the output of the respective resistance heaters (8, 9, 10) is set to a desired temperature value. After removing the test body (3) and the reference temperature indicator (5), the oven (1) is operated according to the control temperature indicators (11, 12, 13) taking into consideration previously determined differences between the reference temperatures and the temperature values of the control temperature indicators (11, 12, 13).

REFERENCES:
patent: 5061663 (1991-10-01), Bolt et al.
patent: 5611856 (1997-03-01), Schunemann et al.
patent: 5685907 (1997-11-01), Fujikawa et al.
patent: 5984524 (1999-11-01), Teshirogi et al.
patent: 6139627 (2000-10-01), Duval et al.
patent: 6334897 (2002-01-01), Asahi et al.
patent: 196 22 659 (1998-09-01), None

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