Method and apparatus for cleaning a web-based chemical...

Details Method and apparatus for cleaning a web-based chemical... Method and apparatus for cleaning a web-based chemical...

2006-06-20

2006-06-20

Rachuba, M. (Department: 3723)

Abrading

Machine

Rotary tool

C451S287000, C451S443000, C451S444000

Reexamination Certificate

active

07063603

ABSTRACT:
A method and apparatus for cleaning a web-based chemical-mechanical planarization (CMP) system. Specifically, a fluid spray bar is coupled to a frame assembly which may be mounted on a CMP system. The fluid spray bar will move along the frame assembly. As the fluid spray bar traverses the length of the frame assembly, a cleaning fluid is sprayed onto the web in order to clean the web between planarization cycles.

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