Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-02-21
2006-02-21
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07002677
ABSTRACT:
An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.
REFERENCES:
patent: 5046847 (1991-09-01), Nakata et al.
patent: 5659390 (1997-08-01), Danko
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6366352 (2002-04-01), Goldberg et al.
International Search Report dated Jul. 22, 2005 from corresponding International Application No. PCT/US04/11127.
Bevis Christopher F.
Kren George J.
Shortt David W.
Sullivan Paul J.
Beyer Weaver & Thomas LLP
KLA-Tencor Technologies Corporation
Rosenberger Richard A.
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