Solid-state image pickup device and method for manufacturing...

Details Solid-state image pickup device and method for manufacturing... Solid-state image pickup device and method for manufacturing...

2006-02-07

2006-02-07

Porta, David (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

Reexamination Certificate

active

06995349

ABSTRACT:
In a solid-state image pickup device having a charge transfer electrode of multilayer electrode structure, a plurality of polycrystalline silicon electrode layers are formed; a sidewall dielectric film is interposed between sidewalls of the electrodes; and a silicide film is formed on the surface of a polycrystalline silicon film exposed from the sidewall dielectric film in a self-aligned manner.

REFERENCES:
patent: 5202282 (1993-04-01), Son
patent: 6188119 (2001-02-01), Ogawa
patent: 63-46763 (1988-02-01), None
patent: 2001-223352 (2001-08-01), None

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