Exposure apparatus

Details Exposure apparatus Exposure apparatus

2006-06-20

2006-06-20

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S069000, C355S071000

Reexamination Certificate

active

07064805

ABSTRACT:
A scanning exposure apparatus for transferring a pattern of an original onto a substrate, includes a flexible blade, arranged between a light source and the original, for defining a width of an illumination area on the original in a scan direction, a first drive system to move the blade in the scan direction at a first position in the illumination area in an orthogonal direction that is orthogonal to the scan direction, and a second drive system to move the blade in the scan direction at a second position outside the illumination area in the orthogonal direction, wherein the first and second positions are arranged so that a position of the blade in the scan direction is maintained still within a predetermined tolerance, at an end position of the illumination area in the orthogonal direction.

REFERENCES:
patent: 5895737 (1999-04-01), McCollough et al.
patent: 5966202 (1999-10-01), McCollough
patent: 6013401 (2000-01-01), McCollough et al.
patent: 6097474 (2000-08-01), McCollough et al.
patent: 6292255 (2001-09-01), McCollough
patent: 10-340854 (1998-12-01), None
patent: 2001-244183 (2001-09-01), None

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