Method of dynamically designing a preventative maintenance...

Details Method of dynamically designing a preventative maintenance... Method of dynamically designing a preventative maintenance...

2006-10-31

2006-10-31

Hoff, Marc S. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S113000, C702S114000, C702S119000, C702S122000, C702S123000, C702S155000, C700S099000

Reexamination Certificate

active

07130769

ABSTRACT:
In one example, the method includes operating a process tool that has a plurality of sensors for sensing at least one parameter associated with the operation of the process tool, obtaining data from the sensors and determining at least one maintenance activity for the process tool based upon the data obtained from the sensors. In another example, data from the sensors is provided to a controller that analyzes the data and indicates desired variations in at least one maintenance activity to be performed on the process tool based upon the analysis of the data. In yet another example, the controller identifies a plurality of maintenance activities to be performed on the process tool based upon the analysis of the data.

REFERENCES:
patent: 5661669 (1997-08-01), Mozumder et al.
patent: 5999886 (1999-12-01), Martin et al.
patent: 6326758 (2001-12-01), Discenzo
patent: 2002/0156542 (2002-10-01), Nandi

Affiliated with

Also associated with

Rating

Method of dynamically designing a preventative maintenance... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of dynamically designing a preventative maintenance..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of dynamically designing a preventative maintenance... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3702943