Optical: systems and elements – Diffraction – From grating
Reexamination Certificate
2006-10-17
2006-10-17
Boutsikaris, Leonidas (Department: 2872)
Optical: systems and elements
Diffraction
From grating
C359S569000, C356S369000, C356S445000, C356S601000
Reexamination Certificate
active
07123414
ABSTRACT:
A method for producing a library includes the steps of calculating a plurality of conditions for a reflection light from a periodic pattern by changing the sectional shape of the periodic pattern, a condition of an incident light which is emitted to the periodic pattern, an optical constant of a material which forms the periodic pattern, relating a plurality of the libraries to the plurality of the reflection light's conditions, and the optical constant corresponding to the plurality of the reflection light's conditions respectively.
REFERENCES:
patent: 6657736 (2003-12-01), Finarov et al.
patent: 6900892 (2005-05-01), Shchegrov et al.
patent: 9-36037 (1997-02-01), None
patent: 10-22205 (1998-01-01), None
patent: 11-211421 (1999-08-01), None
patent: 11-211422 (1999-08-01), None
Taiwan Office Action dated Sep. 12, 2005.
Koean Office Action and its English translation thereof.
Taiwanese Office Action and its English translation thereof.
Ina Hideki
Sentoku Koichi
Boutsikaris Leonidas
Morgan & Finnegan L.L.P.
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