Positioning device and device manufacturing method

Details Positioning device and device manufacturing method Positioning device and device manufacturing method

2006-10-24

2006-10-24

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000

Reexamination Certificate

active

07126674

ABSTRACT:
A positioning device for positioning an object that includes a first actuator and a connector arranged between the first actuator and the object. The connector includes a resilient member and a second actuator connected in series with the resilient member. The first actuator being constructed and arranged to exert a force in a first direction on the connector and the second actuator is controlled to maintain a distance between the first actuator and the object in the first direction substantially constant.

REFERENCES:
patent: 6493062 (2002-12-01), Tokuda et al.
patent: 6538720 (2003-03-01), Galburt et al.
patent: 6597434 (2003-07-01), Van Dijsseldonk
patent: 6906786 (2005-06-01), Cox et al.

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